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根据半导体冷台的数学模型,优化设计出半导体冷台的PID控制器,为精确控制半导体冷台的温度,从理论及实践上都找到了具有应用价值的方法。
According to the mathematical model of the semiconductor cold bench, the PID controller of the semiconductor cold bench is optimized and designed. In order to precisely control the temperature of the semiconductor cold bench, a method with application value has been found theoretically and practically.