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用Ti箔在1 323 K 进行Si3N4 与Ni之间的连接,并对连接界面区的微观形貌、成分分布和界面反应产物进行了分析研究. 结果表明:通过Ni与Ti之间的相互扩散,在Si3N4 表面形成浸润良好的Ti-Ni液体合金,实测Ti-28Ni共晶合金1 323 K 时在Si3N4 表面的浸润角为9°. 基于EDX,XRD 测定结果和热力学分析,确定界面结构为:Si3N4/TiN(反应层Ⅰ)/Ti5Si3+ Ti5Si4+ Ni3Si(反应层Ⅱ)/Ni-Ti化合物层/Ni固溶体/Ni. 反应层Ⅰ和反应层Ⅱ均随连接时间的增加而增厚,但反应层Ⅱ的成长速率和厚度明显高于反应层Ⅰ. 这种界面结构形式在0.9~7.2 ks 的连接时间范围内始终没有发生变化.
The connection between Si3N4 and Ni was carried out with Ti foil at 1 323 K, and the microstructure, composition distribution and interfacial reaction products were analyzed. The results show that the wetted Ti-Ni liquid alloy is formed on the surface of Si3N4 through interdiffusion between Ni and Ti. The measured infiltration angle of Si3N4 on Ti-28Ni eutectic alloy is 9 °. Based on the results of EDX, XRD and thermodynamic analysis, the interfacial structure was determined as: Si3N4 / TiN (reaction layer I) / Ti5Si3 + Ti5Si4 + Ni3Si (reaction layer II) / Ni-Ti compound layer / Ni solid solution / Ni. The reaction layer Ⅰ and reaction layer Ⅱ both thicken with the increase of the connection time, but the growth rate and thickness of the reaction layer Ⅱ were obviously higher than that of the reaction layer Ⅰ. This form of interface structure in the 0.9 ~ 7.2 ks connection time range has not changed.