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采用丝网印刷法在氧化铝基片上制备了大面积多孔PbZr0.3Ti0.7O3热释电厚膜与单元红外探测器。通过掺入Li2CO3与Bi2O3作为助烧剂,实现了厚膜在850℃下的低温烧结。通过保持合适的孔隙率,将厚膜的相对介电常数降低至原值的1/5以提高材料优值与探测率。厚膜在1 kHz、25℃下的相对介电常数与损耗角正切分别为94与0.017。测试了厚膜相对介电常数与损耗随温度的变化规律,测得其居里温度为425℃。通过动态法测试得到厚膜的热释电系数为0.9×10-8 Ccm-2K-1。使用由斩波器调制的黑体辐射,测得单元器件在8.5~2 217 Hz的电压响应与噪声,计算出器件的探测率为3.4×107~1.7×108cmHz1/2W-1。
A large area porous PbZr0.3Ti0.7O3 pyroelectric thick film and unit infrared detector were prepared on alumina substrate by screen printing method. Through the incorporation of Li2CO3 and Bi2O3 as sintering aids, the thick film is sintered at 850 ℃. By maintaining the appropriate porosity, the relative dielectric constant of the thick film is reduced to 1/5 of the original value to improve the material’s excellent value and detection rate. The relative permittivity and loss tangent of thick film at 1 kHz and 25 ℃ are 94 and 0.017, respectively. The relative permittivity and loss of the thick film were tested with the change of temperature. The Curie temperature was measured at 425 ℃. The thick film pyroelectric coefficient was 0.9 × 10-8 Ccm-2K-1 by dynamic test. Using blackbody radiation modulated by a chopper, the voltage response and noise of the device at 8.5-2 217Hz were measured. The detection rate of the device was 3.4 × 107 ~ 1.7 × 108cmHz1 / 2W-1.