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采用GexC1-x(碳化锗)、BP(磷化硼)和α-Si(非晶硅)作为高折射率材料,DLC(类金刚石)作为低折射率材料,在ZnS(硫化锌)、GaAs(砷化镓)、Ge(锗)等常用红外光学窗口表面研制了用于长波红外(8～12μm)波段的GexC1-x/DLC、BP/DLC及α-Si/DLC系列多层保护膜。通过对比试验,研究了多层红外光学窗口保护膜的光学性能、显微硬度及海洋环境适应性。结合红外窗口及膜系材料特性,对试验结果进行了分析讨论。结果表明:GexC1-x/DLC多层红外保护膜具有最佳的光学性能,BP/DLC多层红外保护膜在海洋环境下具有最佳的保护效果。
DLC (DLC) as a low refractive index material is used as a material of a high refractive index in GeSc1-x (germanium carbide), BP (boron phosphide), and a-Si GexC1-x / DLC, BP / DLC and α-Si / DLC series multi-layer protective film for long-wave infrared (8-12μm) band have been developed on the common infrared optical window surfaces such as GaAs (Ge) and Ge (Ge) Through comparative experiments, the optical properties, microhardness and adaptability of marine environment of multi-layer infrared optical window protective film were studied. Combining the characteristics of infrared window and membrane materials, the experimental results were analyzed and discussed. The results show that: GexC1-x / DLC multi-layer infrared protective film has the best optical properties, BP / DLC multi-layer infrared protective film has the best protection in the marine environment.