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在所构建的纳秒脉冲激光电化学复合加工(LECM)系统中,利用激光辐照和脉冲电化学复合加工的方法,在相同的工艺参数下,分别对304不锈钢、7075铝合金、1060纯铝等金属和脆性材料硅进行了加工试验。探讨了激光热力效应促进电化学加工的机理,并对不同金属材料的极化曲线进行了测量。通过扫描电子显微镜(SEM)对比分析了不同材料复合加工表面的微观形貌;并通过超景深三维显微镜对不同材料的加工深度、宽度与深宽比进行了分析。试验结果表明,在激光热力作用下,铝合金的电化学刻蚀质量和表面形貌较好,且可以加工出深宽比较大的微结构;脆性材料则存在微颗粒的冲击崩离。
In the constructed nanosecond pulsed laser electrochemical machining (LECM) system, using laser irradiation and pulsed electrochemical composite processing methods, under the same process parameters, 304 stainless steel, 7075 aluminum alloy, 1060 pure aluminum Metal and brittle materials such as silicon were tested. The mechanism of laser thermal effect on electrochemical machining was discussed. The polarization curves of different metallic materials were also measured. The micro-topography of the composite surface of different materials was analyzed by scanning electron microscope (SEM). The processing depth, width and aspect ratio of different materials were analyzed by the depth of field three-dimensional microscope. The experimental results show that the electrochemical etching quality and surface morphology of the aluminum alloy are better under the action of laser heat, and the micro-structure with larger aspect ratio can be worked out. The fragile material has the impact collapse of the micro-particles.