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用直流(DC)和射频(RF)磁控共溅射法在硅衬底上制备Al-Al_2O_3复合膜,用射频磁控溅射Al_2O_3膜作对比。通过XPS、XRD、HRTEM、FESEM和SPM研究了Al-Al_2O_3复合膜和纯Al_2O_3膜的微观结构和表面形貌,用纳米压痕仪和材料表面性能测试仪测试了样品的显微硬度和抗摩擦磨损性能。结果表明,当射频功率PRF恒定时,Al-Al_2O_3复合膜中Al相的含量和晶粒尺寸与直流功率PDC呈正比关系,Al的加入使Al-Al_2O_3复合膜中非晶态的Al_2O_3颗粒细化,相比纯Al_2O_3膜,表面粗糙度明显降低,并对复合膜力学性能产生影响。Al-Al_2O_3复合膜的硬度高于纯Al_2O_3膜,并具有更加优异的抗摩擦磨损性。直流功率PDC=50 W时,Al-Al_2O_3复合膜综合性能最佳,硬度达到14.4 GPa,摩擦因数低至0.15。
Al-Al_2O_3 composite films were prepared on silicon substrates by direct current (DC) and radio frequency (RF) magnetron sputtering, and compared with RF magnetron sputtering Al 2 O 3 films. The microstructure and surface morphology of Al-Al_2O_3 composite films and pure Al_2O_3 films were investigated by XPS, XRD, HRTEM, FESEM and SPM. The microhardness and friction resistance of the samples were measured by nanoindentation and surface properties tester Wear performance. The results show that when the RF power PRF is constant, the Al content and the grain size in the Al-Al 2 O 3 composite film are directly proportional to the DC power PDC. The addition of Al makes the Al 2 O 3 particles in the Al-Al 2 O 3 composite film thinner Compared with the pure Al 2 O 3 film, the surface roughness decreased obviously and the mechanical properties of the composite film were affected. The hardness of Al-Al_2O_3 composite film is higher than pure Al_2O_3 film, and has more excellent anti-friction and wear resistance. DC power PDC = 50 W, Al-Al_2O_3 composite film the best overall performance, the hardness of 14.4 GPa, the friction coefficient as low as 0.15.