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图形化蓝宝石衬底(PSS)技术是一种提高LED亮度的新技术。结合光刻和刻蚀工艺制作图形化蓝宝石衬底。有关图形化蓝宝石衬底的研究主要集中在对光刻和刻蚀工艺的研究,以及图形化蓝宝石衬底提高LED亮度的机理。目前微米级图形化蓝宝石衬底已经得到普遍的应用,与基于平坦蓝宝石衬底的LED相比,PSS-LED的发光功率提高了30%左右。图形化蓝宝石衬底技术的发展经历了从早期的条纹状图形到目前应用较广的半球形和锥形图形,从湿法刻蚀到干法刻蚀,从微米级到纳米级图形的演变。由于能够显著提高LED亮度,纳米级图形化蓝宝石必将得到广泛的运用。
Graphical sapphire substrate (PSS) technology is a new technology to improve LED brightness. Combined with lithography and etching process to make a patterned sapphire substrate. The research on the patterned sapphire substrate mainly focuses on the research of lithography and etching process, as well as the mechanism that the patterned sapphire substrate enhances the LED brightness. At present, micron-scale patterned sapphire substrate has been widely used, compared with the flat sapphire-based LED, PSS-LED luminous power increased by about 30%. The development of the patterned sapphire substrate technology has gone through from the early striped pattern to the currently widely used hemispherical and tapered patterns, from wet etching to dry etching, from micron to nanoscale patterns. Due to the significantly improved LED brightness, nanoscale graphical sapphires are bound to gain widespread use.