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研究了 N2 流量、阴极偏压、工作气压等工艺参数对电子浴辅助阴极电弧源法合成 Al N薄膜质量的影响规律及其原因。
The effects of process parameters such as N2 flow rate, cathode bias voltage and working pressure on the quality of AlN thin films synthesized by electron-assisted cathode arc source method were studied.