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为比较使用不同气体工质的电子回旋共振(ECR)中和器的性能,在真空环境下,用一个电子收集板模拟离子的作用,将电子电流从ECR中和器中引出,实验研究了以氩气和氪气为工质时,ECR中和器引出电子电流的大小以及中和器的性能。实验结果表明:以氩气为工质,ECR中和器在体积流量0.8 m L/min时,88.6 V电压可引出103.8 m A的电子电流,工质利用效率和电子损耗分别为1.278 9 W/A和194.573 W/A;以氪气为工质,ECR中和器在体积流量0.6 m L/min时,75 V电压可引出108 m A电子电流,工质利用效率和电子产生损耗分别为1.783 2W/A和176.7 W/A。以氪气为工质的中和器性能明显优于氩气,但2种工质都可以满足ECR离子源中和离子束流的需要。
In order to compare the performance of ECR neutralizers using different gaseous working fluids, an electron collection plate was used to simulate the action of ions in a vacuum environment to extract electron current from the ECR neutralizer. Argon and krypton gas as the working medium, the ECR neutralizer leads to the size of the electron current and neutralizer performance. The experimental results show that the electron current of 103.8 mA can be induced by the voltage of 88.6 V with an argon gas as the working medium and the ECR neutralizer at a volume flow rate of 0.8 m L / min. The utilization efficiency and electron loss of the working fluid are 1.278 9 W / A and 194.573 W / A, respectively. With krypton gas as the working fluid, the ECR neutralizer can induce 108 mA electron current at a volume flow rate of 0.6 m L / min. The utilization efficiency and electron production loss of working fluid are 1.783 2W / A and 176.7 W / A. The performance of neutralizer using krypton as working medium is obviously better than that of argon, but the two kinds of working medium can meet the need of neutralizing ion beam in ECR ion source.