论文部分内容阅读
一、引言在过去比较长的时间内,我们一直采用液态硼酸三甲脂作为P型杂质扩散源。在实践过程中,我们感到硼酸三甲脂作为P型杂质扩散源有其缺点,比如均匀性、重复性不理想,控制比较困难,热分解过程中析出的原子碳腐蚀石英管道等。因此,根据毛主席精益求精的教导,要求寻找更为理想的P型杂质扩散源。我们在以前使用二氧化二硼、氮化硼的认识基础上,经过多次反复实验,证实氮化硼固态扩散源优越于硼酸三甲脂液态扩散源。
I. Introduction In the past for a long time, we have been using liquid trimethyl borate as P-type impurity diffusion source. In practice, we feel that trimethyl borate as a P-type impurity diffusion source has its drawbacks, such as uniformity, repeatability is not ideal, the control is more difficult, the thermal decomposition of the atomic carbon deposition of quartz corrosion and other channels. Therefore, according to Chairman Mao’s continuous improvement, it is required to find a better source of P-type impurities. Based on the previous knowledge of using boron oxide and boron nitride, we have repeatedly experimented to prove that boron nitride solid state diffusion source is superior to liquid trimethyl borate diffusion source.