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纳米工作台在纳米技术领域、超大规模集成电路制造和超精密工程中有着广泛的应用前景。现重点介绍Queensgate纳米工作台的关键技术 ,并对其相关的理论问题、工作原理和技术思想进行了必要的补充
Nanometer table in the field of nanotechnology, VLSI manufacturing and ultra-precision engineering has a wide range of applications. The key technologies of Queensgate nanometer workbench are introduced emphatically, and the relevant theoretical problems, working principles and technical ideas are supplemented as necessary