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用SEM对SnO2/Fe2O3样品的断面结构进行了观察研究,发现SnO2是在Fe2O3柱状结构的间隙中开始生长的,据此提出了双层膜结构生长热力学模型,由模型推出的结论与实验结果吻合。计算结果表明,SnO2在Fe2O3薄膜的间隙中生长速度很快,而后逐渐变慢,达到稳定沉积速率,在这种沉积速率下形成SnO2的柱状结构。SnO2膜的这种沉积方式使得Fe2O3与其接触面积很大,两者结合十分牢固。
The cross-sectional structure of SnO2 / Fe2O3 samples was observed by SEM. It was found that SnO2 began to grow in the gap of Fe2O3 columnar structure, and the thermodynamic model of the growth of double-layered film structure was proposed. The conclusion from the model is consistent with the experimental results . The calculated results show that SnO2 grows rapidly in the gap of Fe2O3 thin film and then slowly slows down to reach a steady deposition rate, forming a columnar structure of SnO2 at this deposition rate. The deposition of SnO2 film makes the Fe2O3 contact area is very large, the combination of the two is very solid.