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基于微机械系统(MEMS)圆盘谐振器工作时阻抗大、振荡频率高以及寄生电容大的特点,设计实现了一款用于驱动MEMS圆盘谐振器的宽带高增益、低噪声和低功耗跨阻放大器。该放大器引入低功耗宽带电流预放大和电流电压转换级输入技术,实现了宽带低功耗下低噪声性能。并结合改进型Cherry-Hooper反相器电压放大的电路结构以获得高增益带宽积,采用4~16译码控制电流、电压偏置技术,提高调试通过率及成品率。采用TSMC 0.18μm CMOS工艺流片后,测试结果表明,跨阻增益高达73 d BΩ,-3 d B带宽为163 MHz,功耗为21.6 m W,等效输入噪声电流谱密度为14 p A/Hz,芯片面积为1 538μm×680μm。
Based on the characteristics of large impedance, high oscillation frequency and large parasitic capacitance when MEMS disk resonators work, a broadband high gain, low noise and low power consumption for driving MEMS disk resonators are designed and implemented. Transimpedance amplifier. The amplifier introduces low-power broadband current pre-amplification and current-voltage conversion stage input technology to achieve low-noise broadband performance with low power. Combining the circuit structure of the improved Cherry-Hooper inverter voltage amplifier to obtain high-gain bandwidth product, a 4 ~ 16 decoding control current and voltage bias technique is adopted to improve the debugging pass rate and yield. The test results show that the transimpedance gain is up to 73 d BΩ, the bandwidth of -3 d B is 163 MHz, the power consumption is 21.6 mW, and the equivalent input noise current spectral density is 14 p A / Hz, the chip area is 1 538μm × 680μm.