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各种化学气相沉积和金刚石薄膜技术的发展,为金刚石薄膜在光学、超硬工具涂层等领域提供了广阔的应用前景。而这些应用需要对沉积获得的金刚石膜粗糙表面进行抛光。本文介绍了新近发展的金刚石薄膜抛光技术。并对其发展前景进行了探讨。
The development of various chemical vapor deposition and diamond film technologies has provided broad application prospects for diamond films in the fields of optics and super-hard tool coatings. These applications require the polishing of the rough surface of the diamond film deposited. This article describes the recent development of diamond film polishing technology. And its development prospects were discussed.