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为了解决普通条纹计数法在余弦信号极大/极小值位置难于判向的问题,提出一种基于双法布里-珀罗(F-P)干涉仪的比值条纹计数法。利用正切信号在相位为π/2整数倍时发生跳变的特点,取两路正交余弦干涉信号的比值(即为正切信号),再通过对跳变脉冲计数,在测量相位差大小的同时,实现了对相位变化方向的判定。本方法对传感器两光路之间的初始相位差无严格要求,安装调试简单。实验结果表明,以位移传感为例,系统在0~1mm的测量范围内,线性相关系数达到0.9999,线性度为0.306%,误差限值为±3μm。
In order to solve the problem that the ordinary fringe counting method is difficult to judge at the maximum / minimum position of the cosine signal, a ratio fringe counting method based on the double Fabry-Perot (F-P) interferometer is proposed. Taking advantage of the characteristic that the tangential signal is tripped when the phase is an integral multiple of π / 2, the ratio of the two orthogonal cosine interference signals (ie, the tangential signal) is taken and then, by counting the transition pulse, while measuring the magnitude of the phase difference , To achieve the direction of the phase change judgment. The method of the initial phase difference between the two optical sensors without strict requirements, easy installation and commissioning. The experimental results show that the displacement of the sensor as an example, the system in the 0 ~ 1mm measurement range, the linear correlation coefficient of 0.9999, linearity of 0.306%, the error limit of ± 3μm.