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通过建立KDP晶体超精密加工机床气体静压主轴的三维有限元模型,在考虑主轴装配的接触关系和螺钉预紧力的情况下,计算得到了主轴结构在工作状态下的变形。计算结果表明,由于结合面和主轴受拉伸长,轴承气膜间隙增大;气体压力导致止推板从中心到边缘发生翘曲变形,止推轴承的气膜为楔形。实验结果表明,有限元模型的计算误差小于11%。
Through the establishment of the three-dimensional finite element model of the hydrostatic spindle of the KDP crystal ultra-precision machining machine, the deformation of the spindle structure under working conditions was calculated taking the contact relationship of the spindle assembly and the screw preload into consideration. The calculated results show that due to the tensile elongation of the joint surface and the main shaft, the clearance of the bearing gas film increases. The gas pressure causes the warpage of the thrust plate from the center to the edge. The gas film of the thrust bearing is wedge-shaped. Experimental results show that the calculated error of the finite element model is less than 11%.