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用多源沉积方法制备了Zn薄膜,讨论了制备条件对ZnS膜结晶性能的影响。用这种方法将Mn,Er,Nd和Sm等金属掺入ZnS薄膜中,得到了相应的ACEL。对Mn和Er金属掺杂的ZnS薄膜的ACEL特性以及它们和制备条件的依赖关系进行了讨论
Zn thin films were prepared by multi-source deposition method and the influence of preparation conditions on the crystallization properties of ZnS films was discussed. In this way, metals such as Mn, Er, Nd and Sm are incorporated into the ZnS film to obtain the corresponding ACEL. The ACEL properties of Mn and Er-doped ZnS thin films and their dependence on the preparation conditions are discussed