应用热丝辅助等离子体化学气相沉积法 (CVD)合成了表面呈柱状的BC2 N薄膜 ,X射线、红外及X射线电子能谱分析表明 ,薄膜的化学组分主要为BC2 N ,B ,C和N原子间互相结合成键 .扫描电镜观察到 ,薄膜表面形貌呈排列整齐、取向一致的柱体 ,并且发现这种生长方式与沉积参数密切相关 .最后从结合能方面讨论了柱状BC2 N的生长机理 . The BC2N thin films with columnar surface were synthesized by hot filament assisted plasma chemical vapor deposition (CVD). The results of X-ray, infrared and X-ray photoelectron spectroscopy showed that the chemical compositions of the thin films were BC2N, B, C and N atoms are bonded to each other, and the scanning electron microscopy shows that the surface morphology of the films is aligned and aligned, and the growth pattern is closely related to the deposition parameters.Finally, the binding energy of columnar BC2N Growth mechanism.