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采用数值方法对光敏层电阻率的非均匀分布及对位置敏感探测器(PSD)的影响进行了研究,结果显示,在现有的制作工艺保障最大电阻率变化不超过1%时,电阻率的非均匀分布对四边形PSD的非线性影响很小,相比较之下,其对一维PSD的影响要大的多。因此,光敏层电阻率的非均匀分布是造成一维PSD非线性的一个主要原因,而对于四边形二维PSD则不是主要原因。
The non-uniform distribution of the resistivity of the photosensitive layer and the influence on the PSD are studied numerically. The results show that the resistivity of the resistivity of the photosensitive layer is less than 1% when the existing fabrication process ensures that the maximum resistivity does not exceed 1% The non-uniform distribution has a small effect on the nonlinearity of the quadrilateral PSD. In contrast, the effect on the one-dimensional PSD is much greater. Therefore, the non-uniform distribution of the resistivity of the photosensitive layer is one of the main causes of the one-dimensional PSD nonlinearity, but not the quadrilateral two-dimensional PSD.