【摘 要】
：
C4F8 plasma with the addition of H2 is generated by the inductively coupled plasma (ICP) method. The relative densities of CF, CF2, H and F radicals are determi
【机 构】
：
Department of Physics, Suzhou University, Suzhou 215006, China
论文部分内容阅读
C4F8 plasma with the addition of H2 is generated by the inductively coupled plasma (ICP) method. The relative densities of CF, CF2, H and F radicals are determined by actinometric optical emission spectroscopy (AOES) as a function of the gas flow rate ratio R=H2/(H2+C4F8) at a pressure of 0.8 Pa and an input r.f. power of 400W, while that of HF is measured by quadrupole mass spectrometry (QMS). The results show that plasma activity increases firstly and then decreases with increasing R. As the gas flow rate ratio R changes from 0 to 0.625, relative densities of both CF and CF2 decrease, and the relative [CF] has a similar tendency as the calculated [CF], indicating that CF radicals are generated mainly by the electron impact dissociation of CF2 radicals. Production of HF is also discussed.
其他文献
我国是一个农业大国,有9亿农民,因此加强“三农”工作,积极发展现代农业,扎实推进社会主义新农村建设,是全面落实科学发展观、构建社会主义和谐社会的必然要求,更是加快社会
The stationary-state nonlinear Schr(o)dinger equation, which models the dilute-gas Bose-Einstein condensate, is introduced within the framework of the quantum p
This paper presents a simple scheme for information transmission between two non-directly interactive qubits in an n-qubit system. An example has been realized
Another algorithm for chaotification of any given linear time-invariant discrete-time systems is presented. The new chaotification algorithm uses the decentrali
We report the experiments on the optical breakdown and filamentation of femtosecond laser pulses propagating in air at a kHz repetition rate and with several hu
Using Monte Carlo simulation, we have compared the magnetic properties between nanostructured thin films and two-dimensional crystalline solids. The dependence
澳门新闻事业已有一百六十年历史,现有十六家报纸。其中中文日报六家:澳门日报、华侨报、大众报、市民日报、星报、先锋日报。中文报纸日销量六万多份。葡文报纸有七
The j
1947年3月中旬,在美帝国主义的支持下,蒋介石、胡宗南纠集十五个旅二十多万兵力向陕甘宁解放区发动了猖狂进攻,妄图攻占中共中央所在地延安,打击我中央首脑机关和消灭西北解
Polymer photovoltaic cells based on low band-gap copolymer, poly [2,7-(9,9-dioctyl) fluorene-co-5,5’-(4,7-diselenophenyl)-2,2’-yl-2,1,3-benzothiadiazole] (PFS
The phenomenon of stochastic resonance (SR) in a bistable nonlinear system with coupling between additive and multiplicative noises is investigated when the cor