硅微谐振式加速度计在真空封装后出现非线性振动,导致测量品质因数的常规方法失效。为了能对真空封装的加速计进行精确监测,提出了一种品质因数测量方法。该方法基于谐振梁的非线性振动模型,通过将扫频数据按照模型公式拟合得到品质因数,适用于非线性振动时的情况。利用谐振式加速度计进行实验,验证了该方法的一致性和准确性,测得加速度计品质因数均在2×105以上。使用该方法对真空封装的气压与品质因数的关系进行了研究,表明真空封装的气压保持在0.1Pa左右;并对真空封装进行了温度实验和长期跟踪,证明了真空封装的可靠性。 Silicon microresonance accelerometers exhibit non-linear vibrations after vacuum encapsulation, resulting in the failure of conventional methods of measuring the figure of merit. In order to accurately monitor the vacuum package accelerometer, a quality factor measurement method is proposed. The method is based on the nonlinear vibration model of the resonant beam, and the quality factor is obtained by fitting the swept frequency data according to the model formula, which is suitable for the case of nonlinear vibration. Experiments using the resonant accelerometer verify the consistency and accuracy of the method, and the accelerometer figures of merit are all above 2 × 105. The relationship between the vacuum pressure and the quality factor of the vacuum packaging was studied using this method. The experimental results show that the pressure of the vacuum packaging is about 0.1Pa. The temperature of the vacuum packaging and the long-term tracking are also verified. The reliability of the vacuum packaging is proved.