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本文介绍了提高硅光探测器量子效率的半球形点阵技术。介绍了运用这一技术制作的P-I-N和RAPD硅光探测器。
This article describes the hemispherical dot matrix technology to improve the quantum efficiency of silicon photodetectors. Introduced using this technology produced P-I-N and RAPD silicon photodetector.