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通过采用射频等离子体对由于表面碳污染减少光通量的同步辐射光学元件进行原位清洗实验,利用质谱仪、X射线电子能谱对清洗过程以及表面变化进行监测,并对清洗过程截止点进行研究。结果表明射频等离子体清洗方法可有效去除严重影响光束线使用效率的碳污染,提高光束线使用效率;通过监测气体成分变化能为截止点判断提供有效依据。
In-situ cleaning experiment of synchrotron optical element with reduced flux due to surface carbon pollution was carried out by using radio frequency plasma. The cleaning process and surface change were monitored by mass spectrometer and X-ray photoelectron spectroscopy, and the cut-off point of cleaning process was studied. The results show that the RF plasma cleaning method can effectively remove the carbon pollution that seriously affects the efficiency of the beamline and improve the efficiency of the beamline. It can provide an effective basis for judging the cut-off point by monitoring the change of gas composition.