论文部分内容阅读
结合用于磨床加工的光外差表面粗糙度在线干涉测量仪，文中介绍了高精度动态相位计的设计与实现。依据相位测量和整数周期计数相结合的原理，不仅提高了测量精度，而且将测量范围得以扩大；利用锁相环频率跟踪的特点，实现动态测量。在工作中心频率为2MHz应用场合下，该相位计的测量精度达2．6°（相当于3．2nm），允许测量中最大多普勒频移±20kHz（对应高度的变化率±8．75×10-3m／s），完全满足磨床加工中表面粗糙度在线测量的要求。现场测试证实了这一点。
Combined with the optical heterodyne surface roughness on-line interferometer used in the machining of grinder, the design and implementation of high precision dynamic phase meter are introduced in this paper. According to the principle of combining phase measurement and integer period counting, not only the measurement accuracy is improved, but also the measurement range can be expanded. The phase-locked loop frequency tracking is used to realize the dynamic measurement. The measurement accuracy of the phase meter is 2.6 ° (equivalent to 3.2 nm) at a frequency of 2 MHz in the work center, allowing maximum Doppler shift of ± 20 kHz in the measurement (rate of change corresponding to ± 8.75 × 10-3m / s), fully meet the requirements of on-line surface roughness measurement in grinding machine. Field tests confirm this.