论文部分内容阅读
基于应变梯度弹性理论,研究了静电激励MEMS微结构吸合电压的尺寸效应.利用最小势能原理分别推导出含尺寸效应的一维梁模型和二维板模型的高阶控制方程.采用广义微分求积法和拟弧长算法对控制方程进行了数值求解.结果表明,随着结构尺寸的降低,新模型所预测的归一化的吸合电压呈非线性增长,表现出尺寸效应(特别是当结构尺寸与内禀常数在同一数量级时尺寸效应更加强烈);而相应的经典理论模型并不能预测此尺寸效应.两种新模型可视为相应经典理论的推广.论文有助于研究MEMS微结构的特性并对微结构的设计有潜在的应用价值.
Based on the theory of strain gradient elasticity, the size effect of the electrostatic attraction of MEMS microstructures is studied, and the governing equations of one-dimensional beam with dimension effect and the two-dimensional plate model are deduced by using the principle of least potential energy separately. The results show that the normalized pull-in voltage predicted by the new model shows a non-linear increase with the decrease of the size of the structure, which shows the size effect (especially when The size effect is more intense when the structure size and the intrinsic constant are in the same order of magnitude. However, the corresponding classical theoretical model can not predict this size effect. Two new models can be regarded as the extension of the corresponding classical theory. The characteristics of the microstructure design and potential application value.