Sintered plates of 5mol% yttria-partially-stabilized zirconia have been implanted at room temperature with 5×1015to 2×1017 Fe+ ions/cm2 at 140 KeV.Electrical measurement,Rutherford backscattering spectroscopy(RBS),Raman spectroscopy and X-ray photoelectron spectroscopy(XPS) have been used to study the surface electrical properties and the structure of the implanted layer before and after thermal annealing treatment in N2.