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在阐述声表面波技术后,介绍了声表面波器件用的压电陶瓷材料的种类、基本性能和特点.对压电陶瓷材料的使用要求有:有适合制造叉指电极的良好表面;声表面波传输衰减要小;有很高的机电耦合系数;温度特性好;一致性、重现性好.在与压电晶体作对比的基础上,分析了压电陶瓷材料的主要优缺点.设计性能良好的声表面波器件,主要取决于叉指电极设计、压电材料和工艺加工的好坏.最后着重叙述钨锂酸铟声表面波压电材料的特点和研制过程.
After the introduction of SAW technology, the types, basic properties and characteristics of piezoelectric ceramic materials used in SAW devices are introduced.The requirements for the use of piezoelectric ceramic materials are: a good surface suitable for making interdigital electrodes; Wave transmission attenuation is small; there is a high electromechanical coupling coefficient; good temperature characteristics; consistency, good reproducibility.Compared with the piezoelectric crystal on the basis of the analysis of the main advantages and disadvantages of piezoelectric ceramic materials. Design performance The good SAW device mainly depends on the design of the interdigital electrode, the piezoelectric material and the processing of the material, and finally, it focuses on the characteristics and development process of the ITO-SAW piezoelectric material.