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本文论述了电子显微镜、电子束曝光机、彩色显象管等真空电子设备或器件的磁偏转、磁聚焦线圈的磁场分布参数的实时自动测量,论述了自动测量的硬件系统和软件系统。文中所阐述的微机辅助的磁场分布参数测量,采用了我们研制并通过部级鉴定的磁测仪[1],它是由Apple—Ⅱ微机控制的测量载流线圈空间磁场分布参数的专用装置.
This paper discusses the real-time automatic measurement of magnetic deflection parameters and magnetic field distribution parameters of vacuum electronic devices or devices such as electron microscope, electron beam exposure machine and color picture tube, and discusses the hardware and software system of automatic measurement. The computer-aided magnetic field distribution parameter measurement described in this paper uses the magnetic detector developed by us and passed the ministry-level appraisal [1]. It is a special device controlled by Apple-Ⅱ microprocessor to measure the magnetic field distribution parameters of the current-carrying coil.