近几年来,美国、日本研制和生产半导体器件的一些主要公司、实验室、都在对χ-射线光刻技术进行研究和改进,发展很快,已开始用于超大规模集成电路的试验性生产。 光刻技术是制造集成电路的关键技术。传统的紫外线光刻在集成电路的发展中曾经起了重要作用,但是近二年来,随着 In recent years, some major companies and laboratories developing and manufacturing semiconductor devices in the United States and Japan have been researching and improving χ-ray lithography and have been developing rapidly. They have begun to experimentally manufacture very large scale integrated circuits . Lithography is the key technology for manufacturing integrated circuits. The traditional UV lithography in the development of integrated circuits has played an important role, but in the past two years, with the