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分析了阵列悬臂探针并行扫描的工作方式,以非接触磁力模拟样品与悬臂梁间的范德华力,研究了1×2阵列压电悬臂梁的并行扫描和驱动控制方法。每一压电梁均集成了微位移致动器和力传感器,在320Hz一阶共振频率下振动。实验表明:在0.2～1.0mm力作用区内,压电梁自由端每接近模拟样品0.1mm,表征悬臂梁振幅的锁相放大器输出电压减小1.7mV,但微力传感在扫描的升回程存在迟滞;致动器的控制电压每增加10V使锁相放大器输出减小约3mV,表明集成的致动器可调节压电梁与样品间的间距。两压电梁的电荷-位移响应曲线、间距调节灵敏度均不完全一致,讨论了阵列悬臂梁一致性问题和阵列规模大小问题。
The working mode of array cantilever probe parallel scanning was analyzed. The van der Waals forces between sample and cantilever beam were simulated by non-contact magnetic force. The parallel scanning and driving control method of 1 × 2 array piezoelectric cantilever beam was studied. Each piezoelectric beam integrates a micro-displacement actuator and a force sensor that vibrate at a first-order resonant frequency of 320 Hz. The experimental results show that the output voltage of the lock-in amplifier, which characterizes the amplitude of the cantilever, decreases by 1.7mV every time the free end of the piezoelectric beam approaches 0.1mm near the simulation sample in the force range of 0.2-1.0mm. However, Hysteresis; each 10V increase in the actuator’s control voltage reduces the lock-in amplifier output by about 3mV, indicating that the integrated actuator adjusts the spacing between the piezoelectric beam and the sample. The charge-displacement response curves and the sensitivity of pitch adjustment of the two piezoelectric beams are not exactly the same, and the issue of the consistency of the array cantilever and the size of the array are discussed.