采用改进的MEVVA源阴极对不锈钢进行了V +C共注入 ,并做了X射线衍射分析 ,硬度和磨损实验。V +C共注入剂量为 1× 10 17— 8× 10 17cm- 2 ,能量为 80keV。实验结果表明 ,V +C共注入后不锈钢表面的机械性能得到了改善 ,表面硬度增加了 16%— 82 % ,而耐磨性则是未注入样品的 1.4— 2 .2倍 ,最好的结果均从剂量为 4× 10 17cm- 2 的样品中得到。X射线分析表明 ,V +C共注入后在不锈钢表面形成了新相FeV ,Cr2 VC2 ,VC ,Cr2 3 C6 和Fe5C2 。这些新相在提高表面硬度和耐磨性方面起了重要作用。这些结果与V +C双注入同种不锈钢所得结果进行了比较 ,比较结果表明共注入方法对材料表面改性比双注入方法更有效。 The modified MEVVA cathode was used to inject V + C into stainless steel. X-ray diffraction, hardness and wear tests were carried out. The total implantation dose of V + C is 1 × 10 17 -8 × 10 17 cm -2, and the energy is 80 keV. The experimental results show that the mechanical properties of the stainless steel surface after V + C co-injection are improved, the surface hardness increases by 16% -82%, and the wear resistance is 1.4-2.2 times that of the uninjected sample. The best results All were obtained from a sample with a dose of 4 x 10 17 cm-2. X-ray analysis showed that new phases FeV, Cr2 VC2, VC, Cr2 3 C6 and Fe5C2 were formed on the surface of stainless steel after V + C co-injection. These new phases play an important role in increasing the surface hardness and wear resistance. These results are compared with the results of double injection of V + C stainless steel. The results show that the co-injection method is more effective than the double injection method on the material surface modification.