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微小型推进器和推进技术的研究开发迫切要求mN级或更小推力的动态测量。该文提出了一种微小力测量方法,采用双弹性元件级联结构,兼顾实现高刚度和高灵敏度的测量性能,并简化了传感器的设计。在该结构原理的理论分析的基础上,研制了一套高灵敏度的电阻应变片式动态力传感器,达到10mV/(mN.V)的灵敏度和0.06mN的分辨率,带宽达到850Hz。通过标定其静、动态性能验证了双弹性元件级联式微小力测量方法的可行性。
Research and development of micro thrusters and propulsion technologies urgently require dynamic measurement of thrust at mN level or less. In this paper, a micro force measurement method is proposed, which uses a biaxial element cascade structure to achieve both high stiffness and high sensitivity measurement performance, and simplifies the sensor design. Based on the theoretical analysis of the principle of the structure, a set of high sensitivity strain gage dynamic force sensors has been developed to achieve a sensitivity of 10mV / (mN.V) and a resolution of 0.06mN with a bandwidth of 850Hz. By calibrating the static and dynamic properties, the feasibility of cascaded micro-force measurement with biaxial elements was verified.