论文部分内容阅读
采用大功率高重复频率准分子激光溅射热解石墨靶制备了类金刚石膜,研究了激光功率密度和重复频率对类金刚石膜的结构及场发射性能的影响。保持重复频率不变,提高激光功率密度可提高膜中sp3键碳的含量和膜的场发射性能;在最佳激光功率密度下,当重复频率由200Hz提高到500Hz,膜中sp3键碳的含量和膜的场发射性能先提高,后降低,在300Hz时达到最佳。在300Hz重复频率、1010W/cm2激光功率密度下,膜的发射阈值电场为26V/μm,在34V/μm的电场下测得电流密度为14μA/cm2。根据类金刚石膜的场发射机理对上述结果进行了分析解释。
Diamond-like carbon films were prepared by pyrolytic graphite target with high power and high repetition frequency excimer laser sputtering. The effects of laser power density and repetition frequency on the structure and field emission of diamond-like carbon films were studied. Keeping the repetition frequency constant, raising the laser power density can increase the content of sp3 bond in the film and the field emission performance of the film; at the optimum laser power density, when the repetition frequency increases from 200Hz to 500Hz, the sp3 bond carbon content in the film And the field emission performance of the film first increased, then decreased, to achieve the best at 300Hz. At a repetition rate of 300 Hz and a laser power density of 1010 W / cm2, the emission threshold electric field of the film was 26 V / μm and the current density was 14 μA / cm2 at an electric field of 34 V / μm. Based on the field emission mechanism of diamond-like carbon films, the above results were analyzed and explained.