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以Al、Cu、Ag、Mo、Cr为衬底层,在650℃热硅基片上制备了未经后退火工艺处理的Sm Co基永磁薄膜,研究了薄膜内禀矫顽力的变化规律。结果表明,采用Mo和Cr作为衬底层可以提高薄膜的内禀矫顽力。Sm Co基永磁薄膜的厚度对内禀矫顽力的影响复杂,当薄膜厚度为3.0μm时,可以获得室温内禀矫顽力的最大值为281.6 k A·m-1。内禀矫顽力的温度依赖关系主要取决于薄膜的相关磁学参数,在25~300℃范围内,内禀矫顽力高于200 k A·m-1。
SmCo-based PM films were prepared on 650 ℃ hot silicon substrate without any post-annealing process with Al, Cu, Ag, Mo and Cr as the substrate. The variation of intrinsic coercivity of the films was investigated. The results show that the use of Mo and Cr as the underlying layer can improve the intrinsic coercivity of the film. The influence of the thickness of the SmCo-based permanent magnet film on the intrinsic coercivity is complicated. When the film thickness is 3.0 μm, the maximum intrinsic coercivity at room temperature can be obtained as 281.6 kA · m-1. The temperature dependency of intrinsic coercivity mainly depends on the relevant magnetic parameters of the film. The intrinsic coercivity is higher than 200 kA · m-1 in the range of 25 ~ 300 ℃.