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硅基光互连技术是解决目前电互连制约瓶颈的有效手段,而实用化集成光源的制备对硅基芯片功耗的降低和尺寸的减小有着十分重要的意义。硅基集成激光器在过去的十多年间取得了一系列重要突破,其中III-V/Si混合集成激光器是近期最可能获得实际应用的方案之一。文章简要分析了硅基集成激光器的研究现状,重点介绍了III-V/Si混合集成激光器的研究进展,包括III-V/Si键合激光器和III-V/Si倒装焊激光器的发展和各自存在的问题,并预测了硅基集成激光器的发展方向。
The silicon-based optical interconnection technology is an effective way to solve the bottleneck of the current interconnection. However, it is of great significance to reduce the power consumption and reduce the size of the silicon-based chip by the practical integrated light source. Silicon based integrated lasers have made a series of important breakthroughs in the past decade or so, among which the III-V / Si hybrid integrated lasers are one of the most promising practical solutions. In this paper, the current research status of Si-based integrated lasers is briefly analyzed. The research progress of III-V / Si hybrid integrated lasers, including the development of III-V / Si bonded lasers and III- Existing problems, and predict the development direction of silicon-based integrated laser.