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1 前言 半导体器件的稳定性除了与器件的制造材料、器件本身的结构有关外,在相当大的程度上还取决于对其表面的保护措施——即表面钝化。钝化是改善器件性能和提高可靠性所不可缺少的手段和重点工艺。早在五十年代,人们
1 Introduction Semiconductor device stability in addition to the device manufacturing materials, the structure of the device itself, but also to a considerable extent depends on the protection of its surface - that is, the surface passivation. Passivation is to improve the performance of devices and improve the reliability of the indispensable means and key processes. As early as the fifties, people