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Amorphous GaAs films are deposited on substrates of quartz glass and silicon by rf magnetron sputtering technique in different gas ambient.First,the amorphous structure of the prepared samples is identified by x-ray diffraction.Second,analysis by radial distribution function and pair correlation function method is established to characterize the microstructure of the samples.Then,the content and bond type of hydrogen are analysed using Fourier transform infrared absorption spectroscopy.