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为了提高脉冲激光制备薄膜的质量,准确掌握电声弛豫时间是关键,它对脉冲激光脉宽和能量密度的选取起着决定性的作用.文中以铝靶材为例,利用经典的双温方程通过时域有限差分法(FDTD)得到电子、离子亚系统的温度随时间和位置演化的图像,进而得到电声弛豫时间的准确值.这样便能准确划分热烧蚀和非平衡烧蚀,从而更好地控制激光的烧蚀过程.同时找出了电声弛豫时间随激光脉宽以及能量密度变化的规律.
In order to improve the quality of pulsed laser thin films, it is the key to accurately grasp the electro-acoustic relaxation time, which plays a decisive role in the choice of pulsed laser pulse width and energy density.Taking the aluminum target as an example, The time-domain and temperature-evolution images of the electron and ion sub-systems are obtained by the FDTD method, and the exact value of the electro-acoustic relaxation time is obtained, thus the thermal ablation and non-equilibrium ablation can be accurately classified, So as to better control the laser ablation process.At the same time, the law of electroacoustic relaxation time with laser pulse width and energy density was found out.