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新材料氮化碳薄膜具有超强硬度和独特的物理、化学性质.近年来,引起国内、外学者的重视,1989年,Liu等从理论上预测人工合成具有β-C_3N_4结构的氮化碳材料的可能性,该材料有很大体变模量B,使其具有超强硬度等特性,极有可能在光电、磁、机械工业等领域获重要的应用,但合成工艺上一直没有取得突破,直到1993年,美国哈佛大学Niu等报道采用激光束蒸发石墨加氮离子束源工艺合成出氮化碳薄膜,该方法回避了等离子工艺过程的热动力学平衡及限制,显然只可作为人工合成预测的新材料的原理性方法而无法实用.我们从1988
In recent years, a great deal of attention has been paid to domestic and foreign scholars. In 1989, Liu et al. Theoretically predicted the synthesis of carbon nitride material with β-C_3N_4 structure The material has a very large bulk modulus B, so that it has the characteristics of super hardness and other properties, is likely to have important applications in optoelectronics, magnetism, machinery industry and other fields, but the synthesis process has not made a breakthrough until In 1993, Niu et al. At Harvard University of the United States reported using laser beam evaporation graphite with nitrogen ion beam source technology to synthesize carbon nitride films. This method avoids the thermodynamic equilibrium and limitation of the plasma process and can only be used as a prediction of synthetic The principle of new materials and methods can not be practical. We from 1988