A theoretical model of relationship between subsurface damage and surface roughness was established to realize rapid and non-destructive measurement of subsurface damage of ground optical materials. Postulated condition of the model was that subsurface damage depth and peak-to-valley surface roughness are equal to depth of radial and lateral cracks in brittle surface induced by small-radius (radius≤200 μm) spherical indenter, respectively. And contribution of elastic stress field to the radial cracks propagation was also considered in the loading cycle. Subsurface damage depth of ground BK7 glasses was measured by magnetorheological finishing spot technique to validate theoretical ratio of subsurface damage to surface roughness. The results show that the ratio is directly proportional to load of abrasive grains and hardness of optical materials, while inversely proportional to granularity of abrasive grains and fracture toughness of optical materials. Moreover, the influence of the load and fracture toughness on the ratio is more significant than the granularity and hardness, respectively. The measured ratios of 80 grit and 120 grit fixed abrasive grinding of BK7 glasses are 5.8 and 5.4, respectively.