论文部分内容阅读
介绍了一种具有纳米级测量灵敏度的非接触光探针平整度仪,其分辨率优于1nm。这种测试仪在电子玻璃、半导体、集成电路、薄膜和纳米技术等领域都具有很大的应用前景。给出了该平整度仪在液晶显示器中液晶分子取向膜边缘表面轮廓形状研究方面的一些测试结果。结果表明,该平整度仪可以在液晶显示器件研究中发挥作用。
A non-contact optical probe flatness meter with nanometer-scale measurement sensitivity is introduced, the resolution is better than 1nm. This tester has great application prospects in the fields of electronic glass, semiconductors, integrated circuits, thin films and nanotechnology. Some test results of the flatness meter on the outline of the edge surface of liquid crystal molecular alignment film in liquid crystal display are given. The results show that the flatness meter can play a role in the research of liquid crystal display device.