论文部分内容阅读
The total ionizing dose radiation effects in the polycrystalline silicon thin film transistors are studied.Transfer characteristics,high-frequency capacitance-voltage curves and low-frequency noises (LFN) are measured before and after radiation.The experimental results show that threshold voltage and hole-field-effect mobility decrease,while sub-threshold swing and low-frequency noise increase with the increase of the total dose.The contributions of radiation induced interface states and oxide trapped charges to the shift of threshold voltage are also estimated.Furthermore,spatial distributions of oxide trapped charges before and after radiation are extracted based on the LFN measurements.