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一般微机械加工的梁──岛结构加速度传感器，梁的平面都是与器件平面平行的，因此只能测量器件平面法向的加速度分量．我们提出了一种制作梁平面与器件平面相垂直的梁──岛结构的微机械加工方法，并用以设计和制造了一种可测量平行于器件平面的加速度分量的横向加速度传感器，为研制三维加速度传感器提供了新思路．
Generally micro-machined beam ─ ─ Island structure acceleration sensor, the beam plane are parallel with the plane of the device, it can only measure the normal component of the plane acceleration components. We propose a micro-machined method of fabricating a beam-island structure perpendicular to the plane of the device and to design and fabricate a lateral acceleration sensor that measures the acceleration component parallel to the plane of the device. Accelerometer provides a new idea.