论文部分内容阅读
微机电系统(MEMS,Micro Electromechanical Systems)在航空航天、汽车、生物医学、环境监控、军事等领域中有着广泛的应用前景.其材料力学性能的测试目前是其性能测试的薄弱环节,它涉及到微位移、精密定位和载荷/位移测量.采用传统“机械”制造技术,由于摩擦、间隙、爬行和多环节传动误差积累等原因而无法实现.为此,提出了一种冗余驱动全柔性并联机构和压电陶瓷驱动器所组成的新型测量平台.在推导4RRR冗余驱动并联机构运动学逆问题方程的基础上,经过最佳拓扑选择、运动学分析,并基于动力学优化,确定了微位移/精密定位运动平台主要结构尺寸.实验表明:采用该平台,可以满足MEMS材料力学性能测量所需的微位移和精确定位要求.
MEMS (Micro Electromechanical Systems) has a wide range of applications in the fields of aerospace, automotive, biomedicine, environmental monitoring, military, etc. The testing of the mechanical properties of materials is currently the weakness of its performance testing, which involves Micro displacement, precise positioning and load / displacement measurement.Using traditional “mechanical” manufacturing technology, due to friction, clearance, crawling and multi-link transmission error accumulation and other reasons can not be achieved.To this end, a redundant driver Flexible parallel mechanism and piezoceramic actuator.On the basis of deducing the inverse kinematics equation of 4RRR redundant driving parallel mechanism, after the optimal topological selection, kinematic analysis and dynamic optimization, Micro-displacement / precision positioning of the main structure of the mobile platform size.Experiments show that: using the platform to meet the mechanical properties of MEMS materials required for micro-displacement and precise positioning requirements.