设计了一种用准分子激光烧蚀法制备高温超导薄膜与器件的真空系统．它由主室、副室、若干机械手、分子泵等组成．主室允许人们轮流淀积５种不同材料的薄膜并能原位更换掩模，副室可实现等离子体刻蚀或反应离子刻蚀，随后可在不暴露大气的情况下将样品转移至主室。文中描述了关键部件的功能与结构。 A vacuum system for the fabrication of high temperature superconducting thin films and devices by excimer laser ablation was designed. It consists of the main room, deputy chamber, a number of robots, molecular pumps and other components. The main chamber allows one to alternate the deposition of films of five different materials and replace the mask in situ, with the plasma chamber or reactive ion etch being performed in the secondary chamber and subsequently transferring the sample to the main chamber without exposing the atmosphere . The article describes the key components of the function and structure.