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笔者设计了一种电热激励压阻检测的微悬臂梁谐振器.悬臂梁上的敏感层吸附特定的气体后,可以通过测量质量变化所导致的悬臂梁谐振频率的变化而得出待测气体的浓度.该谐振器的加工基于SOI硅片和ICP刻蚀技术.通过有限元仿真得出了悬臂梁的应力温度分布曲线,从而证实了该方案可以提供比普通结构更适宜于气体敏感材料工作的温度分布.从理论和实验上分析了谐振器在不同激励电压下的频率响应.实验结果表明,该谐振器具有较高的谐振频率和品质因数,其激励电压与振动幅值成线性关系.
The author designs a kind of micro-cantilever resonator with piezoresistive detection by electrothermal excitation. After the sensitive layer on the cantilever adsorbs a specific gas, the resonant frequency of the cantilever caused by the mass change can be measured to obtain the gas Concentration.The resonator is fabricated based on SOI wafer and ICP etching technology.The stress-temperature profile of the cantilever beam is obtained by finite element simulation, which confirms that the proposed scheme can provide more gas-sensitive material than the conventional structure Temperature distribution.The theoretical analysis and experimental analysis of the resonator under different excitation voltage frequency response.The experimental results show that the resonator has a higher resonant frequency and quality factor, the excitation voltage and the vibration amplitude of a linear relationship.