准确检验硅粉中杂质含量对于提高多晶硅品质来说至关重要。一种准确、快速的硅粉杂质检测方法,无论是对于生产规模较大的硅粉厂家,还是生产多晶硅的企业来说,都具有重大意义。本文通过实验对国标方法进行优化、提升,以缩短硅粉的检测时间,提高工作效率,且通过实验对改进后的方法的准确性和可靠性进行验证。 Accurate testing of the impurities in the silica fume is crucial to improve the quality of the polysilicon. An accurate and rapid detection method of silicon powder impurities, both for the production of large-scale silicon powder manufacturers, or the production of polysilicon enterprises, are of great significance. In this paper, we optimized and upgraded the national standard method through experiments to shorten the detection time of silica fume and improve work efficiency, and verified the accuracy and reliability of the improved method through experiments.