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以激光溅射的方式，可以产生不同尺寸与组分的原子团簇．但是对这些团簇的生长过程，却一直缺少比较深入和细致的研究．本文结合激光真空溅射石墨的实验条件，考虑了激光能量、体系膨胀、环境压力、热量辐射等诸多因素，建立了在该条件下碳原子团簇生长的物理模型，得出了相应的动力学方程的数值解．计算结果表明：每个激光脉冲溅射出约8×10－9mol（5×1015个）粒子，它们产生时的初始压力约为2×105Pa．由于扩散等因素，团簇的形成反应在785μs后已不可能进行，但是各团簇产物的产率在反应开始后0．4μs左右已达到最大值，在约1．5μs内反应即已基本完成，因为此后原子团簇的尺寸分布不再有显著的差异．
By laser sputtering, atomic clusters of different sizes and compositions can be produced. However, the growth of these clusters has been the lack of more in-depth and meticulous research. In this paper, the physical model of the growth of carbon clusters under this condition was established by considering the laser energy, system expansion, environmental pressure, heat radiation and other factors, and the corresponding kinetic equation Numerical solution. The calculated results show that about 8 × 10-9mol (5 × 1015) particles are sputtered per laser pulse, and the initial pressure when they are generated is about 2 × 10 5 Pa. Due to the diffusion and other factors, the formation reaction of clusters has not been possible after 785μs, but the yield of each cluster product has reached the maximum about 0.4μs after the start of the reaction, and the reaction has been basically completed in about 1.5μs , Since there is no longer a significant difference in the size distribution of atomic clusters.