论文部分内容阅读
介绍了一种基于PIN光电二极管的紫外激光脉冲能量在线检测系统.首先,采用激光主光路外的检测光实现激光脉冲能量的无损在线响应;其次,采用高速高精度积分电路将响应光电流处理为电压峰值;最后,利用激光系统的同步触发信号进行检测时序设计从而获得精确的激光脉冲前后的检测系统输出差值,经过计算后获得精确的激光脉冲能量.检测系统在248 nmKrF和308 nmXeCl准分子激光器上进行了测试,实现了对0~200 Hz重复率运行的准分子激光能量在线无损检测,测量结果与输出端外置能量计测得结果相对比,相关性与可重复性一致,满足应用需求.“,”A kind of ultraviolet pulse laser energy detection system based on PIN photodiode was introduced. Firstly, the light outside main optical path was used to realize nondestructive and real-time pulse energy detecting. Secondly, high-speed and high-precision integral circuit was designed to process photocurrent signal for voltage peak. Finally, the synchronous trigger signal of laser system was used for timing sequence design. Thus, the accurate voltage difference was obtained and the exact laser pulse energy can be calculated. Tested on 248 nmKrF and 308 nmXeCl excimer laser, the real-time nondestructive measuring was realized while the laser ran in a pulse repetition mode up to 200 Hz. The relevance and repeatability of the measuring data were in accordance with the results of the external energy meter of output end and the system meets the application requirements.