论文部分内容阅读
以国家节水企业评价标准与其他类似节水指标为指导,结合芯片制造产业特征与台湾同类企业评价标准,总结提出针对芯片制造产业的节水评价指标。设计指标从总体用水,主要生产单元以及主要辅助单元三方面考察企业用水情况,其中主要生产单元用水作为重要考察对象,包括纯水制造单元和芯片制造线的清洗水回收。运用该指标对现有浦东典型企业用水状况和节水潜力进行评估。结果显示,A厂主要生产单元总回用率达到70.4%,清洗水回用率达到75.6%,明显高于B厂,而按传统计算内循环水为回用水时,两厂回用率均在98%左右,相差不大,说明所设计指标能较直接准确地反映企业的节水水平。
Guided by the evaluation criteria of national water-saving enterprises and other similar water-saving targets, combining with the characteristics of chip manufacturing industry and the evaluation standards of similar enterprises in Taiwan, this paper summarizes the water-saving evaluation indexes for chip manufacturing industry. Design Indicators The water use of the enterprises is examined from the aspects of total water use, main production units and main auxiliary units. The main production unit uses water as an important inspection target, which includes the recovery of washing water from pure water production units and chip manufacturing lines. Use this indicator to evaluate the water consumption and water saving potential of the existing Pudong typical enterprises. The results showed that the total reuse rate of main production units of Factory A reached 70.4% and the reuse rate of cleaning water reached 75.6%, which was significantly higher than that of Factory B. When the internal recycle water was used as back-up water, the reuse rates of both plants were 98% or so, little difference, indicating that the design indicators can be more directly and accurately reflect the level of water-saving enterprises.